SALES

Manufacturer: AMAT

Model: Centura

Category: RTP-MOD II

Wafer Size: 8

 

Details:

System,8"

Mainframe type:TPCC

Loadlock type:Wide body

Chamber type:Mod II

Chamber A:MOD II ATM RTP

Process:RTP

Chamber B:MOD II ATM RTP

Process:RTP

Chamber C:MOD II ATM RTP

Process:RTP

Line frequency:60 HZ

System power:208 VAC

Mainframe information:ENP Type

Robot type:HP/HP+

Center Finder:OTF

Cooldown Type:Fast Cooldown

Gas Panel:Universal

Gas Line:Multi-Drop